JPS6326926Y2 - - Google Patents

Info

Publication number
JPS6326926Y2
JPS6326926Y2 JP1982014340U JP1434082U JPS6326926Y2 JP S6326926 Y2 JPS6326926 Y2 JP S6326926Y2 JP 1982014340 U JP1982014340 U JP 1982014340U JP 1434082 U JP1434082 U JP 1434082U JP S6326926 Y2 JPS6326926 Y2 JP S6326926Y2
Authority
JP
Japan
Prior art keywords
sample
parabolic mirror
electron beam
semi
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982014340U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58117058U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1434082U priority Critical patent/JPS58117058U/ja
Publication of JPS58117058U publication Critical patent/JPS58117058U/ja
Application granted granted Critical
Publication of JPS6326926Y2 publication Critical patent/JPS6326926Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP1434082U 1982-02-04 1982-02-04 走査電子顕微鏡用カソ−ドルミネツセンス装置 Granted JPS58117058U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1434082U JPS58117058U (ja) 1982-02-04 1982-02-04 走査電子顕微鏡用カソ−ドルミネツセンス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1434082U JPS58117058U (ja) 1982-02-04 1982-02-04 走査電子顕微鏡用カソ−ドルミネツセンス装置

Publications (2)

Publication Number Publication Date
JPS58117058U JPS58117058U (ja) 1983-08-10
JPS6326926Y2 true JPS6326926Y2 (en]) 1988-07-21

Family

ID=30026810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1434082U Granted JPS58117058U (ja) 1982-02-04 1982-02-04 走査電子顕微鏡用カソ−ドルミネツセンス装置

Country Status (1)

Country Link
JP (1) JPS58117058U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT306804B (de) * 1971-10-05 1973-04-25 Oesterr Studien Atomenergie Kathodolumineszenzeinrichtung für Rasterelektronenmikroskope
JPS517072A (en]) * 1974-07-08 1976-01-21 Satsuki Kitani

Also Published As

Publication number Publication date
JPS58117058U (ja) 1983-08-10

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